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Journal: MicromachinesVolume: 15Number: 1480
Article: Fatigue-Induced Failure of Polysilicon MEMS: Nonlinear Reduced-Order Modeling and Geometry Optimization of On-Chip Testing Device
  • Authors:
  • Daniel Calegaro1,*,
  • Massimiliano Merli2 and
  • Giacomo Ferrari2
  • et al.
Link: https://www.mdpi.com/2072-666X/15/12/1480

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