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Journal: MicromachinesVolume: 13Number: 1550
Article: AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
  • Authors:
  • Yichen Liu1,
  • Lihao Wang1 and
  • Yongquan Su1,2
  • et al.
Link: https://www.mdpi.com/2072-666X/13/9/1550

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