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Journal: MicromachinesVolume: 13Number: 791
Article: Investigation on the Effect of Annealing Temperature on the Side Ohmic Contact Characteristics for Double Channel GaN/AlGaN Epitaxial Layer
- Authors:
- Qingzhi Meng1,†,
- Qijing Lin1,2,3,4,*,† and
- Weixuan Jing1
- et al.
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