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Journal: MicromachinesVolume: 13Number: 129
Article: Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature
  • Authors:
  • Yang Yue1,
  • Maosong Sun1 and
  • Jie Chen1
  • et al.
Link: https://www.mdpi.com/2072-666X/13/1/129

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