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Journal: MicromachinesVolume: 10Number: 460
Article: A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators
- Authors:
- Xiaoqing Shi1,2,
- Sen Zhang1,2 and
- Deyong Chen1,2,*
- et al.
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