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Journal: MicromachinesVolume: 10Number: 202
Article: The Influence of AlN Intermediate Layer on the Structural and Chemical Properties of SiC Thin Films Produced by High-Power Impulse Magnetron Sputtering
- Authors:
- Nierlly Galvão1,*,
- Marciel Guerino1 and
- Tiago Campos1
- et al.
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