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Journal: MicromachinesVolume: 10Number: 162
Article: Experimental Setup for Dynamic Analysis of Micro- and Nano-Mechanical Systems in Vacuum, Gas, and Liquid
  • Authors:
  • Bram van den Brink,
  • Farbod Alijani* and
  • Murali Krishna Ghatkesar*
Link: https://www.mdpi.com/2072-666X/10/3/162

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