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Journal: Micromachines, 2016
Volume: 7
Number: 167

Article: Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications
Authors: by Zhu Li, Wen Jie Wu, Pan Pan Zheng, Jin Quan Liu, Ji Fan and Liang Cheng Tu
Link: https://www.mdpi.com/2072-666X/7/9/167

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