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Journal: Micromachines, 2025
Volume: 16
Number: 104
104
Article: Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity
Authors: by Sanjeev Vishal Kota, Anil Thilsted, Daniel Trimarco, Jesper Yue Pan, Ole Hansen, Jörg Hübner, Rafael Taboryski and Henri Jansen
Link: https://www.mdpi.com/2072-666X/16/1/104

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