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Journal: MicromachinesVolume: 15Number: 256
Article: Effect of a Photolithography Polymer Mask’s Dynamic Viscoelasticity on Microchannel Cross-Sectional Shapes of Glass Processed by Micropowder Blasting
- Authors:
- Mikinari Takada,
- Mao Hamamoto and
- Hiromasa Yagyu*
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