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Journal: Micromachines, 2024
Volume: 15
Number: 256
Article:
Effect of a Photolithography Polymer Mask’s Dynamic Viscoelasticity on Microchannel Cross-Sectional Shapes of Glass Processed by Micropowder Blasting
Authors:
by
Mikinari Takada, Mao Hamamoto and Hiromasa Yagyu
Link:
https://www.mdpi.com/2072-666X/15/2/256
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