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Journal: Micromachines, 2024
Volume: 15
Number: 226

Article: Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors
Authors: by Yameng Shan, Lei Qian, Junduo Wang, Kewei Wang, Peng Zhou, Wenchao Li and Wenjiang Shen
Link: https://www.mdpi.com/2072-666X/15/2/226

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