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Micromachines2024, 15(2), 175;https://doi.org/10.3390/mi15020175

Journal: MicromachinesVolume: 15Number: 175

Article: Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

Authors:
Ziba Torkashvand¹,
Farzaneh Shayeganfar¹ and
Ali Ramazani^2,*

Link: https://www.mdpi.com/2072-666X/15/2/175

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