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Journal: Micromachines, 2024
Volume: 15
Number: 175

Article: Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices
Authors: by Ziba Torkashvand, Farzaneh Shayeganfar and Ali Ramazani
Link: https://www.mdpi.com/2072-666X/15/2/175

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