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Journal: Micromachines, 2024
Volume: 15
Number: 1480
Article:
Fatigue-Induced Failure of Polysilicon MEMS: Nonlinear Reduced-Order Modeling and Geometry Optimization of On-Chip Testing Device
Authors:
by
Daniel Calegaro, Massimiliano Merli, Giacomo Ferrari and Stefano Mariani
Link:
https://www.mdpi.com/2072-666X/15/12/1480
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