Li, W.;                     Zha, F.;                     Fu, B.;                     Li, Y.;                     Duan, J.;                     Zhou, Z.    
        A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes. Micromachines 2024, 15, 145.
    https://doi.org/10.3390/mi15010145
    AMA Style
    
                                Li W,                                 Zha F,                                 Fu B,                                 Li Y,                                 Duan J,                                 Zhou Z.        
                A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes. Micromachines. 2024; 15(1):145.
        https://doi.org/10.3390/mi15010145
    
    Chicago/Turabian Style
    
                                Li, Wei,                                 Fangyuan Zha,                                 Bo Fu,                                 Yanglong Li,                                 Jiazhu Duan,                                 and Ziyou Zhou.        
                2024. "A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes" Micromachines 15, no. 1: 145.
        https://doi.org/10.3390/mi15010145
    
    APA Style
    
                                Li, W.,                                 Zha, F.,                                 Fu, B.,                                 Li, Y.,                                 Duan, J.,                                 & Zhou, Z.        
        
        (2024). A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes. Micromachines, 15(1), 145.
        https://doi.org/10.3390/mi15010145