Hwang, J.-Y.; Wysocki, L.; Yarar, E.; Wille, G.; Röhr, F.; Albers, J.; Gu-Stoppel, S.
Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies. Micromachines 2023, 14, 1789.
https://doi.org/10.3390/mi14091789
AMA Style
Hwang J-Y, Wysocki L, Yarar E, Wille G, Röhr F, Albers J, Gu-Stoppel S.
Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies. Micromachines. 2023; 14(9):1789.
https://doi.org/10.3390/mi14091789
Chicago/Turabian Style
Hwang, Jeong-Yeon, Lena Wysocki, Erdem Yarar, Gunnar Wille, Fin Röhr, Jörg Albers, and Shanshan Gu-Stoppel.
2023. "Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies" Micromachines 14, no. 9: 1789.
https://doi.org/10.3390/mi14091789
APA Style
Hwang, J.-Y., Wysocki, L., Yarar, E., Wille, G., Röhr, F., Albers, J., & Gu-Stoppel, S.
(2023). Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies. Micromachines, 14(9), 1789.
https://doi.org/10.3390/mi14091789