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Journal: Micromachines, 2023
Volume: 14
Number: 1162
Article:
A Study on the Material Removal Characteristics and Damage Mechanism of Lapping for Pressureless Sintered Silicon Carbide (SSiC) Microlens Cavity
Authors:
by
Tianfeng Zhou, Zhongyi Li, Weijia Guo, Peng Liu, Bin Zhao and Xibin Wang
Link:
https://www.mdpi.com/2072-666X/14/6/1162
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