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Journal: MicromachinesVolume: 14Number: 1162
Article: A Study on the Material Removal Characteristics and Damage Mechanism of Lapping for Pressureless Sintered Silicon Carbide (SSiC) Microlens Cavity
  • Authors:
  • Tianfeng Zhou1,2,
  • Zhongyi Li1 and
  • Weijia Guo1,*
  • et al.
Link: https://www.mdpi.com/2072-666X/14/6/1162

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