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Journal: Micromachines, 2023
Volume: 14
Number: 1045
Article:
Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane
Authors:
by
Le Hao, Cun Li, Lukang Wang, Bing Bai, Yulong Zhao and Chao Luo
Link:
https://www.mdpi.com/2072-666X/14/5/1045
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