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Journal: MicromachinesVolume: 14Number: 550
Article: Laser-Patterned Alumina Mask and Mask-Less Dry Etch of Si for Light Trapping with Photonic Crystal Structures
  • Authors:
  • Jovan Maksimovic1,†,
  • Haoran Mu1,† and
  • Daniel Smith1
  • et al.
Link: https://www.mdpi.com/2072-666X/14/3/550

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