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Journal: Micromachines, 2023
Volume: 14
Number: 550
550
Article: Laser-Patterned Alumina Mask and Mask-Less Dry Etch of Si for Light Trapping with Photonic Crystal Structures
Authors: by Jovan Maksimovic, Haoran Mu, Daniel Smith, Tomas Katkus, Mantas Vaičiulis, Ramūnas Aleksiejūnas, Gediminas Seniutinas, Soon Hock Ng and Saulius Juodkazis
Link: https://www.mdpi.com/2072-666X/14/3/550

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