Article Versions Notes

Li D, Sun H, Liu T, Jin H, Li Z, Liu Y, Liu D, Wang D. Influence of O₂ Flow Rate on the Properties of Ga₂O₃ Growth by RF Magnetron Sputtering. Micromachines. 2023; 14(2):260. https://doi.org/10.3390/mi14020260

Li, Dengyue, Hehui Sun, Tong Liu, Hongyan Jin, Zhenghao Li, Yaxin Liu, Donghao Liu, and Dongbo Wang. 2023. "Influence of O₂ Flow Rate on the Properties of Ga₂O₃ Growth by RF Magnetron Sputtering" Micromachines 14, no. 2: 260. https://doi.org/10.3390/mi14020260

Li, D., Sun, H., Liu, T., Jin, H., Li, Z., Liu, Y., Liu, D., & Wang, D. (2023). Influence of O₂ Flow Rate on the Properties of Ga₂O₃ Growth by RF Magnetron Sputtering. Micromachines, 14(2), 260. https://doi.org/10.3390/mi14020260