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Journal: Micromachines, 2023
Volume: 14
Number: 2229
Article:
On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry
Authors:
by
Alessio Buzzin, Lorenzo Giannini, Gabriele Bocchetta, Andrea Notargiacomo, Ennio Giovine, Andrea Scorza, Rita Asquini, Giampiero de Cesare and Nicola Pio Belfiore
Link:
https://www.mdpi.com/2072-666X/14/12/2229
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