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Journal: MicromachinesVolume: 14Number: 2229
Article: On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry
- Authors:
- Alessio Buzzin1,*,
- Lorenzo Giannini1 and
- Gabriele Bocchetta2
- et al.
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