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Journal: Micromachines, 2023
Volume: 14
Number: 2037
Article:
Forty-Nanometer Plasmonic Lithography Resolution with Two-Stage Bowtie Lens
Authors:
by
Yan Meng, Ruiguang Peng, Jie Cheng, Yonggang Meng and Qian Zhao
Link:
https://www.mdpi.com/2072-666X/14/11/2037
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