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Journal: Micromachines, 2023
Volume: 14
Number: 42

Article: Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate
Authors: by Tsuyoshi Tsukada, Ryusei Takigawa, Yoshihiro Hasegawa, Muhammad Salman Al Farisi and Mitsuhiro Shikida
Link: https://www.mdpi.com/2072-666X/14/1/42

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