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Journal: Micromachines, 2022
Volume: 13
Number: 1299
1299
Article: Development of a Flexible MEMS Sensor for Subsonic Flow
Authors: by Koichi Murakami, Daiki Shiraishi, Shunsuke Mizumi, Yoshiko Oya, Naoto Omura, Takanori Shibata, Yoshiyasu Ichikawa and Masahiro Motosuke
Link: https://www.mdpi.com/2072-666X/13/8/1299

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