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Journal: Micromachines, 2022
Volume: 13
Number: 655
Article:
The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes
Authors:
by
Alexandre Azier, Najib Kacem, Bernard Chaumet and Noureddine Bouhaddi
Link:
https://www.mdpi.com/2072-666X/13/5/655
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