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Journal: MicromachinesVolume: 13Number: 655
Article: The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes
  • Authors:
  • Alexandre Azier1,2,
  • Najib Kacem1,* and
  • Bernard Chaumet2
  • et al.
Link: https://www.mdpi.com/2072-666X/13/5/655

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