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Journal: Micromachines, 2022
Volume: 13
Number: 581
Article:
Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d31 and d33 of AlN and AlScN Thin Films
Authors:
by
Hao Zhang, Yang Wang, Lihao Wang, Yichen Liu, Hao Chen and Zhenyu Wu
Link:
https://www.mdpi.com/2072-666X/13/4/581
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