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Journal: Micromachines, 2022
Volume: 13
Number: 525
525
Article: Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
Authors: by Abdullah S. Algamili, Mohd Haris Khir, Abdelaziz Y. Ahmed, Almur A. Rabih, Saeed S. Ba-Hashwan, Sami S. Alabsi, Osamah L. Al-Mahdi, Usman B. Isyaku, Mawahib G. Ahmed and Muhammad Junaid
Link: https://www.mdpi.com/2072-666X/13/4/525

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