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Journal: Micromachines, 2022
Volume: 13
Number: 513

Article: A Strategy for Extracting Full Material Coefficients of AlN Thin Film Based on Resonance Method
Authors: by Chen Wang, Yang Yang, Lifeng Qin, Shenglin Ma and Yufeng Jin
Link: https://www.mdpi.com/2072-666X/13/4/513

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