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Journal: Micromachines, 2022
Volume: 13
Number: 314

Article: Prediction of Surface Roughness as a Function of Temperature for SiO2 Thin-Film in PECVD Process
Authors: by Muhammad Rizwan Amirzada, Yousuf Khan, Muhammad Khurram Ehsan, Atiq Ur Rehman, Abdul Aleem Jamali and Abdul Rafay Khatri
Link: https://www.mdpi.com/2072-666X/13/2/314

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