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Micromachines2021, 12(2), 172;https://doi.org/10.3390/mi12020172

Journal: MicromachinesVolume: 12Number: 172

Article: Evaluation and Optimization of a MOEMS Active Focusing Device

Authors:
Ulrich Mescheder^1,2,*,
Michael Lootze¹ and
Khaled Aljasem³

Link: https://www.mdpi.com/2072-666X/12/2/172

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