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Journal: Micromachines, 2020
Volume: 11
Number: 1033
Article:
Redeposition-Free Deep Etching in Small KY(WO4)2 Samples
Authors:
by
Simen Mikalsen Martinussen, Raimond N. Frentrop, Meindert Dijkstra and Sonia Maria Garcia-Blanco
Link:
https://www.mdpi.com/2072-666X/11/12/1033
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