Search Results (118)

Structured-light 3D reconstruction is an active measurement technique that extracts spatial geometric information of objects by projecting fringe patterns and analyzing their distortions. It has been widely applied in industrial inspection, cultural heritage digitization, virtual reality, and other related fields. This review presents a comprehensive analysis of mainstream fringe-based reconstruction methods, including Fringe Projection Profilometry (FPP) for diffuse surfaces and Phase Measuring Deflectometry (PMD) for specular surfaces. While existing reviews typically focus on individual techniques or specific applications, they often lack a systematic comparison between these two major approaches. In particular, the influence of different projection schemes such as Digital Light Processing (DLP) and MEMS scanning mirror–based laser scanning on system performance has not yet been fully clarified. To fill this gap, the review analyzes and compares FPP and PMD with respect to measurement principles, system implementation, calibration and modeling strategies, error control mechanisms, and integration with deep learning methods. Special focus is placed on the potential of MEMS projection technology in achieving lightweight and high-dynamic-range measurement scenarios, as well as the emerging role of deep learning in enhancing phase retrieval and 3D reconstruction accuracy. This review concludes by identifying key technical challenges and offering insights into future research directions in system modeling, intelligent reconstruction, and comprehensive performance evaluation. Full article

A technique that enables real-time diagnosis of bladder cancer is needed. Optical coherence tomography (OCT) is a promising technique, but a forward-looking OCT catheter is necessary for OCT to enable bladder cancer diagnosis. This study aims to describe the design of a novel forward-looking microelectromechanical systems (MEMS)-based OCT catheter, assess the performance characteristics, and evaluate its ability to identify histopathological characteristics of bladder specimens. A description of the OCT catheter and systems used is provided. Performance characteristics were measured with a beam profiler and microscopy slide (mirror for dispersion and thickness for lateral calibration). Ex vivo measurements were performed on resected bladder tissue from patients undergoing a radical cystectomy. A forward-looking OCT probe with an outer diameter of 2.52 mm and a rigid length of 17 mm was designed and evaluated. The focus position was measured as 10.9 mm from the MEMS mirror, with a Rayleigh length of 2.55 mm. Several histopathological features could be correlated to OCT features of the ex vivo measurements. In conclusion, a forward-looking OCT probe that can be inserted in the working channel of a rigid cystoscope was designed and evaluated. Performance characteristics were overall in line with simulated expectations. Full article

Laser beam scanning (LBS) projection systems based on MEMS micromirrors offer advantages such as compact size, low power consumption, and vivid color performance, making them well suited for applications like AR glasses and portable projectors. Among various scanning methods, raster scanning is widely adopted; however, it suffers from artifacts such as dark bands between adjacent scanning lines and non-uniform distribution of the scanning trajectory relative to the original image. These issues degrade the overall viewing experience. In this study, we address these problems by introducing random variations to the slow-axis driving signal to alter the vertical offset of the scanning trajectories between different scan cycles. The variation is defined as an integer multiple of 1/8 of the fast-axis scanning period ($1/{\mathrm{f}}_{\mathrm{h}}$) Due to the temporal integration effect of human vision, trajectories from different cycles overlap, thereby enhancing the scanning fill factor relative to the target image area. The simulation and experimental results demonstrate that the maximum ratio of non-uniform line spacing is reduced from 7:1 to 1:1, and the modulation of the scanned display image is reduced to 0.0006—below the human eye’s contrast threshold of 0.0039 under the given experimental conditions. This method effectively addresses scanning display artifacts without requiring additional hardware modifications. Full article

In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror generate a Lissajous scanning pattern within an artificial eyeball. The scanning pattern reflected from the eyeball is detected by a linear photodiode sensor array (LPSA). The direction and rotation angle of the artificial eyeball result in varying grayscale values across a series of pixels detected by the LPSA, in which the average grayscale values change accordingly. By performing a linear fit between different rotation angles of the same eye movement direction and the corresponding grayscale values, we can determine the correlation between the direction of eye movement and the signal magnitude received by the LPSA, thereby enabling precise eye tracking. The results demonstrated that the minimum resolution was 0.6°. This preliminary result indicates that the system has good accuracy. In the future, this eye-tracking system can be integrated into various wearable glasses devices and applied in various fields, including medicine and psychology. Full article

Aircraft engines are regularly inspected with borescopes to detect faults at an early stage and maintain airworthiness. A critical part of this inspection process is accurately measuring any detected damage to determine whether it exceeds allowable limits. Current state-of-the-art borescope measurement techniques—primarily stereo camera systems and pattern projection—face significant challenges when engines lack sufficient surface features or when illumination is inadequate for reliable stereo matching. MEMS-based 3D scanners address these issues by focusing laser light onto a small spot, reducing dependency on surface texture and improving illumination. However, miniaturized MEMS-based scanner borescopes that can pass through standard engine inspection ports are not yet available. This work examines the essential steps to downsize MEMS 3D scanners for direct integration into borescope inspections, thereby enhancing the accuracy and reliability of aircraft engine fault detection. Full article

As microelectronic devices become more prevalent daily, miniaturization is emerging as a key trend, particularly in optical systems. Optical systems with volume scanning and imaging capabilities heavily rely on focus control. The traditional focus tuning method restricts the miniaturization of optical systems due to its complex structure and large volume. The recent rapid development of MEMS varifocal optical elements has provided sufficient opportunities for miniaturized optical systems. Here, we review the literature on MEMS varifocal optical elements over the past two decades. Based on light control mechanisms, MEMS varifocal optical elements are divided into three categories: reflective varifocal mirrors, varifocal microlenses, and phased varifocal mirrors. A novel indicator is introduced to evaluate and compare the performance of MEMS varifocal optical elements. A wide range of applications is also discussed. This review can serve as a reference for relevant researchers and engineers. Full article

A MEMS scanning mirror is a beam scanning device based on MEMS technology, which plays an important role in the fields of Lidar, medical imaging, laser projection display, and so on. The accurate measurement of the scanning mirror index can verify its performance and application scenarios. This paper designed and built a scanning mirror benchmark platform based on a two-dimensional position-sensitive detector (PSD), which can accurately measure the deflection angle, resonance frequency, and angular resolution of the scanning mirror, and described the specific test steps of the scanning mirror parameters, which can meet the two-dimensional measurement. Secondly, this paper analyzed and calculated the angular test uncertainty of the designed test system. After considering the actual optical alignment error and PSD measurement error, when the distance between the PSD and MEMS scanning mirror is 100 mm, the range of mechanical deflection angle that can be measured is (−6.34°, +6.34°). When the mechanical deflection angle of the scanning mirror is 0.01°, the accuracy measured by the test system is 0.00097°, and when the mechanical deflection of the scanning mirror is 6.34°, the accuracy measured by the test system is 0.011°. The test platform has high accuracy and can measure the parameters of the scanning mirror accurately. Full article

This study investigates the mechanical and optical characteristics of silicon nitride thin films deposited with PECVD at 80 °C for tunable silicon-rich SiN_x-SiO_y-based MEMS optical cavities. Varying the deposition parameters using SiH₄ and N₂ as precursor gases for silicon-rich SiN_x thin films allows us to tune the refractive index to a value as high as 2.40 ± 0.013 at an extinction coefficient of only 0.008, an extremely low surface roughness of only 0.26 nm, and a compressive stress of about 150 MPa. We deposited 6.5-layer pairs of silicon-rich SiN_x/SiO_y-distributed Bragg reflector (DBR) micro-electro-mechanical system (MEMS) mirror that covers the whole 1300 and 1550 nm range. Cavity architectures of 6.5 top and 6 bottom layer-pairs were fabricated in the clean room providing a variety of cavity lengths between 0.615 µm and 2.85 µm. These lengths were then simulated in order to estimate the Young’s Modulus of silicon-rich SiN_x, obtaining values from 56 to 92 GPa. One of the designs was characterised electro-thermally providing a tuning range of at least 86.7 nm centred at 1585 nm. The tunable filters are well suitable for implementation as tuning element in lasers for optical coherence tomography. Full article

MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study attempted to increase the detection range of MEMS LiDAR with a semi-coaxial design. In this paper, we further investigate the synchronization method for large-aperture electromagnetic MEMS mirrors, in which a synchronous motion transfer model of electromagnetic MEMS mirrors is constructed. The results of the simulations and experiments demonstrate that two electromagnetic MEMS mirrors are synchronous with an aperture of 60 ${\mathsf{\pi }\mathrm{mm}}^2$, FoV of 60°, and scanning frequency of 220 Hz. The entire synchronization process of the electromagnetic MEMS mirrors is completed within 10 s, which verifies the feasibility of synchronizing large-aperture electromagnetic MEMS mirrors to increase the detection range of MEMS LiDAR. Full article

Adaptive optics (AO) systems are capable of correcting wavefront aberrations caused by transmission media or defects in optical systems. The deformable mirror (DM) plays a crucial role as a component of the adaptive optics system. In this study, our focus is on analyzing the ability of a 97-element MEMS (Micro-Electro-Mechanical System) DM to correct blurred images of extended sources affected by atmospheric turbulence. The RUN optimizer is employed as the control method to evaluate the correction capability of the DM through simulations and physical experiments. Simulation results demonstrate that within 100 iterations, both the normalized gray variance and Strehl Ratio can converge, leading to an improvement in image quality by approximately 30%. In physics experiments, we observe an increase in normalized gray variance (NGV) from 0.53 to 0.97 and the natural image quality evaluation (NIQE) from 15.35 to 19.73, representing an overall improvement in image quality of about 28%. These findings can offer theoretical and technical support for applying MEMS DMs in correcting imaging issues related to extended sources degraded by wavefront aberrations. Full article

The MEMS scanning micromirror requires angle sensors to provide real-time angle feedback during operation, ensuring a stable and accurate deflection of the micromirror. This paper proposes a method for integrating piezoresistive sensors on the torsion axis of electrostatic MEMS micromirrors to detect the deflection angle. The design uses a multi-layer bonding process to realize a vertical comb-driven structure. The device structure is designed as a double-layer structure, in which the top layer is the ground layer and integrates with piezoresistive sensor. This approach avoids crosstalk between the applied drive voltage and the piezoresistive sensor. This design also optimizes the sensor’s size, improving sensitivity. A MEMS two-dimensional (2D) scanning micromirror with a 1 mm mirror diameter was designed and fabricated. The test results indicated that, in a vacuum environment, the torsional resonance frequencies of the micromirror’s fast axis and slow axis were 17.68 kHz and 2.225 kHz, respectively. When driving voltages of 33 V and 40 V were applied to the fast axis and slow axis of the micromirror, the corresponding optical scanning angles were 55° and 45°, respectively. The piezoresistive sensor effectively detects the micromirror’s deflection state, and optimizing the sensor’s size achieved a sensitivity of 13.87 mV/V/°. The output voltage of the piezoresistive sensor shows a good linear relationship with the micromirror’s deflection angle, enabling closed-loop feedback control of the electrostatic MEMS micromirror. Full article

Fast steering mirrors (FSMs) designed by the micro-electro-mechanical system (MEMS) technology are significantly smaller in volume and mass, offering distinct advantages. To improve their performance in the open-loop control mode, this study introduces a control algorithm and evaluates its performance on an electromagnetic-driven MEMS-FSM. The algorithm employs a method to shape the input signal by fitting the system’s transfer function and modifying the step response. This shaped signal is then applied to the system to minimize overshoot, reduce settling time, and improve working bandwidth, thereby enabling faster angular adjustments and improving the stability of the FSM. The experimental results demonstrate an 85.65% reduction in overshoot and a decrease in settling time from 84 ms to 0.4 ms. Consequently, the working bandwidth of the FSM system increases to 2500 Hz, demonstrating the effectiveness of the algorithm in enhancing MEMS-FSM’s performance. Full article

A carbon dioxide (CO₂) gas sensor based on non-dispersive infrared (NDIR) technology has been developed and is suitable for use in portable devices for high-precision CO₂ detection. The NDIR gas sensor comprises a MEMS infrared emitter, a MEMS thermopile detector with an integrated optical filter, and a compact gas cell with high optical coupling efficiency. A dual-ellipsoid mirror optical system was designed, and based on optical simulation analysis, the structure of the dual-ellipsoid reflective gas chamber was designed and optimized, achieving a coupling efficiency of up to 54%. Optical and thermal simulations were conducted to design the sensor structure, considering thermal management and light analysis. By optimizing the gas cell structure and conditioning circuit, we effectively reduced the sensor’s baseline noise, enhancing the overall reliability and stability of the system. The sensor’s dimensions were 20 mm × 10 mm × 4 mm (L × W × H), only 15% of the size of traditional NDIR gas sensors with equivalent detection resolution. The developed sensor offers high sensitivity and low noise, with a sensitivity of 15 μV/ppm, a detection limit of 90 ppm, and a resolution of 30 ppm. The total power consumption of the whole sensor system is 6.5 mW, with a maximum power consumption of only 90 mW. Full article

This paper presents the design, simulation, fabrication, and characterization of a novel large-scan-range electrothermal micromirror integrated with a pair of position sensors. Note that the micromirror and the sensors can be manufactured within a single MEMS process flow. Thanks to the precise control of the fabrication of the grid-based large-size Al/SiO₂ bimorph actuators, the maximum piston displacement and optical scan angle of the micromirror reach 370 μm and 36° at only 6 Vdc, respectively. Furthermore, the working principle of the sensors is deeply investigated, where the motion of the micromirror is reflected by monitoring the temperature variation-induced resistance change of the thermistors on the substrate during the synchronous movement of the mirror plate and the heaters. The results show that the full-range motion of the micromirror can be recognized by the sensors with sensitivities of 0.3 mV/μm in the piston displacement sensing and 2.1 mV/° in the tip-tilt sensing, respectively. The demonstrated large-scan-range micromirror that can be monitored by position sensors has a promising prospect for the MEMS Fourier transform spectrometers (FTS) systems. Full article