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Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid

Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, Spain
Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, Jordan
Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, 66123 Saarbrücken, Germany
Author to whom correspondence should be addressed.
Micromachines 2019, 10(5), 283;
Received: 5 April 2019 / Revised: 24 April 2019 / Accepted: 25 April 2019 / Published: 27 April 2019
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
PDF [3091 KB, uploaded 27 April 2019]


A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 μm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid. View Full-Text
Keywords: traveling waves; piezoelectric; microactuator; MEMS traveling waves; piezoelectric; microactuator; MEMS

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Díaz-Molina, A.; Ruiz-Díez, V.; Hernando-García, J.; Ababneh, A.; Seidel, H.; Sánchez-Rojas, J.L. Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid. Micromachines 2019, 10, 283.

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