Next Article in Journal
Resonant Mixing in Glass Bowl Microbioreactor Investigated by Microparticle Image Velocimetry
Next Article in Special Issue
A Shear-Mode Piezoelectric Heterostructure for Electric Current Sensing in Electric Power Grids
Previous Article in Journal
Fabrication, Characterization, and Application of Large-Scale Uniformly Hybrid Nanoparticle-Enhanced Raman Spectroscopy Substrates
Previous Article in Special Issue
3-D Design and Simulation of a Piezoelectric Micropump
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Micromachines
Volume 10
Issue 5
10.3390/mi10050283
micromachines-logo
Submit to this Journal Review for this Journal Propose a Special Issue
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
Article

Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid

by
Alex Díaz-Molina
1,*,
Víctor Ruiz-Díez
1,
Jorge Hernando-García
1,
Abdallah Ababneh
2,
Helmut Seidel
3 and
José Luis Sánchez-Rojas
1
1
Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, Spain
2
Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, Jordan
3
Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, 66123 Saarbrücken, Germany
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(5), 283; https://doi.org/10.3390/mi10050283
Submission received: 5 April 2019 / Revised: 24 April 2019 / Accepted: 25 April 2019 / Published: 27 April 2019
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
Browse Figures
Versions Notes

Abstract

A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 μm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid.
Keywords: traveling waves; piezoelectric; microactuator; MEMS traveling waves; piezoelectric; microactuator; MEMS
Graphical Abstract

Share and Cite

MDPI and ACS Style

Díaz-Molina, A.; Ruiz-Díez, V.; Hernando-García, J.; Ababneh, A.; Seidel, H.; Sánchez-Rojas, J.L. Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid. Micromachines 2019, 10, 283. https://doi.org/10.3390/mi10050283

AMA Style

Díaz-Molina A, Ruiz-Díez V, Hernando-García J, Ababneh A, Seidel H, Sánchez-Rojas JL. Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid. Micromachines. 2019; 10(5):283. https://doi.org/10.3390/mi10050283

Chicago/Turabian Style

Díaz-Molina, Alex, Víctor Ruiz-Díez, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, and José Luis Sánchez-Rojas. 2019. "Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid" Micromachines 10, no. 5: 283. https://doi.org/10.3390/mi10050283

APA Style

Díaz-Molina, A., Ruiz-Díez, V., Hernando-García, J., Ababneh, A., Seidel, H., & Sánchez-Rojas, J. L. (2019). Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid. Micromachines, 10(5), 283. https://doi.org/10.3390/mi10050283

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Metrics

Back to TopTop