Next Article in Journal
Continuous Phase Plate Structuring by Multi-Aperture Atmospheric Pressure Plasma Processing
Next Article in Special Issue
Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid
Previous Article in Journal
Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance
Previous Article in Special Issue
Robust Model-Free Adaptive Iterative Learning Control for Vibration Suppression Based on Evidential Reasoning
Open AccessArticle

3-D Design and Simulation of a Piezoelectric Micropump

MEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(4), 259; https://doi.org/10.3390/mi10040259
Received: 14 February 2019 / Revised: 5 April 2019 / Accepted: 11 April 2019 / Published: 18 April 2019
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid–structure interaction. The maximum predicted outflow is 1.62 μL min 1 , obtained at 10 Hz working frequency. The computational model enables the optimization of geometrical features, with the goal to improve the pumping efficiency: The outflow is increased until 2.5 μL min 1 . View Full-Text
Keywords: piezoelectric material; multiphysics simulation; finite element method (FEM); fluid–structure interaction (FSI); micro electromechanical systems (MEMS) piezoelectric material; multiphysics simulation; finite element method (FEM); fluid–structure interaction (FSI); micro electromechanical systems (MEMS)
Show Figures

Figure 1

MDPI and ACS Style

Farshchi Yazdi, S.A.F.; Corigliano, A.; Ardito, R. 3-D Design and Simulation of a Piezoelectric Micropump. Micromachines 2019, 10, 259.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop