Next Article in Journal
Partial-Gated Memristor Crossbar for Fast and Power-Efficient Defect-Tolerant Training
Next Article in Special Issue
Multichannel Inductive Sensor Based on Phase Division Multiplexing for Wear Debris Detection
Previous Article in Journal
Intersubband Optical Nonlinearity of GeSn Quantum Dots under Vertical Electric Field
Article Menu
Issue 4 (April) cover image

Export Article

Open AccessArticle

A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

1,2, 1,*, 1, 1,2, 1,2,3, 1,4, 1,2 and 1,5,6,*
1
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
3
State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China
4
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
5
School of microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
6
Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Beijing 100083, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(4), 244; https://doi.org/10.3390/mi10040244
Received: 27 March 2019 / Revised: 8 April 2019 / Accepted: 11 April 2019 / Published: 12 April 2019
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume II)
  |  
PDF [5847 KB, uploaded 21 April 2019]
  |  

Abstract

This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. A pair of parallel drive electrodes are symmetrically placed on the surface of the vertical bar for driving the oscillating mass. A serpentine sense electrode is placed on the lateral bar. When the gyroscope is oscillating in drive mode, charges with equal quantity and opposite sign will be polarized and distributed symmetrically along the lateral bar. These charges neutralize each other at the sense electrode. Therefore, no coupling signals can be detected from the sense electrode. This design can realize the decoupling between the drive mode and sense mode. In this work, the T-shape decoupled structure was designed as the key component of an AlN piezoelectric gyroscope and the whole structure was simulated by COMSOL Multiphysics 5.2a. The working principle of the decoupling is described in detail. Electrical properties were characterized by the dynamic signal analyzer. According to the test results, the drive mode and the sense mode are decoupled. The coefficient of orthogonal coupling is 1.55%. View Full-Text
Keywords: aluminum nitride; microelectromechanical systems (MEMS); gyroscope; piezoelectric effect; orthogonal coupling aluminum nitride; microelectromechanical systems (MEMS); gyroscope; piezoelectric effect; orthogonal coupling
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Yang, J.; Si, C.; Han, G.; Zhang, M.; Ning, J.; Zhao, Y.; Yang, F.; Wang, X. A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope. Micromachines 2019, 10, 244.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top