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Journal: MicromachinesVolume: 10Number: 244
Article: A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope
  • Authors:
  • Jian Yang1,2,
  • Chaowei Si1,* and
  • Guowei Han1
  • et al.
Link: https://www.mdpi.com/2072-666X/10/4/244

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