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Journal: Micromachines, 2019
Volume: 10
Number: 158
Article:
Design of a Micromachined Z-axis Tunneling Magnetoresistive Accelerometer with Electrostatic Force Feedback
Authors:
by
Bo Yang, Binlong Wang, Hongyu Yan and Xiaoyong Gao
Link:
https://www.mdpi.com/2072-666X/10/2/158
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