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Journal: Micromachines, 2019
Volume: 10
Number: 758
Article:
A Study on the Effects of Bottom Electrode Designs on Aluminum Nitride Contour-Mode Resonators
Authors:
by
Soon In Jung, Chaehyun Ryu, Gianluca Piazza and Hoe Joon Kim
Link:
https://www.mdpi.com/2072-666X/10/11/758
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