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Journal: Materials, 2025
Volume: 18
Number: 381
Article:
Controlling the Dissolution Behavior of (Meth)acrylate-Based Photoresist Polymers in Tetramethylammonium Hydroxide by Introducing Adamantyl Groups
Authors:
by
Jinyoung Kim, Choong-Jae Lee, Dong-Gun Lee, Geon-Ho Lee, Jayoung Hyeon, Yura Choi and Namchul Cho
Link:
https://www.mdpi.com/1996-1944/18/2/381
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