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Journal: MaterialsVolume: 18Number: 381
Article: Controlling the Dissolution Behavior of (Meth)acrylate-Based Photoresist Polymers in Tetramethylammonium Hydroxide by Introducing Adamantyl Groups
- Authors:
- Jinyoung Kim,
- Choong-Jae Lee and
- Namchul Cho*
- et al.
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