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Journal: Materials, 2024
Volume: 17
Number: 4905

Article: Mechanisms of Chemically Promoted Material Removal Examined for Molybdenum and Copper CMP in Weakly Alkaline Citrate-Based Slurries
Authors: by K. U. Gamagedara and D. Roy
Link: https://www.mdpi.com/1996-1944/17/19/4905

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