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Journal: Materials, 2023
Volume: 16
Number: 3015

Article: Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis
Authors: by Wei-Yu Zhou, Hsuan-Fan Chen, Xue-Li Tseng, Hsiao-Han Lo, Peter J. Wang, Ming-Yu Jiang, Yiin-Kuen Fuh and Tomi T. Li
Link: https://www.mdpi.com/1996-1944/16/8/3015

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