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Journal: Materials, 2023
Volume: 16
Number: 414
414
Article: Effect of Growth Temperature and Atmosphere Exposure Time on Impurity Incorporation in Sputtered Mg, Al, and Ca Thin Films
Authors: by Shamsa Aliramaji, Philipp Keuter, Deborah Neuß, Marcus Hans, Daniel Primetzhofer, Diederik Depla and Jochen M. Schneider
Link: https://www.mdpi.com/1996-1944/16/1/414

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