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Journal: MaterialsVolume: 15Number: 8325
Article: Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters
- Authors:
- Konstantinos Efstathios Falidas1,*,
- Kati Kühnel1 and
- Matthias Rudolph1
- et al.
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