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Journal: Materials, 2022
Volume: 15
Number: 8325
8325
Article: Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO₂ ALD Properties for Improved Electrical and Reliability Parameters
Authors: by Konstantinos Efstathios Falidas, Kati Kühnel, Matthias Rudolph, Maximilian B. Everding, Malte Czernohorsky and Johannes Heitmann
Link: https://www.mdpi.com/1996-1944/15/23/8325

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