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Journal: MaterialsVolume: 15Number: 6036
Article: Fabrication of Nanostructures on a Large-Area Substrate with a Minimized Stitch Error Using the Step-and-Repeat Nanoimprint Process
- Authors:
- Yeonjoo Ha1,2,
- Hyungjun Lim1,2 and
- Hak-jong Choi1
- et al.
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