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Journal: MaterialsVolume: 14Number: 2025
Article: One-Step Etching Characteristics of ITO/Ag/ITO Multilayered Electrode in High-Density and High-Electron-Temperature Plasma
- Authors:
- Ho-Won Yoon1,
- Seung-Min Shin1 and
- Seong-Yong Kwon1
- et al.
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