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Article

Direct van der Waals Epitaxy of Crack-Free AlN Thin Film on Epitaxial WS2

by 1,2,3,†, 1,2,3,†, 1,2,3, 1,2,3,*, 4, 1,2,3, 1,2,3, 1,2,3, 5, 1,2,3,*, 1,2,3,*, 1,2,3 and 1,2,3,*
1
Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3
Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Beijing 100083, China
4
Department of Electrical and Electronic Engineering, The University of Tokushima, 2-1, Minami-josanjima, Tokushima 770-8506, Japan
5
Department of Photonics Engineering, Technical University of Denmark, Ørsteds Plads 345A, DK-2800 Kongens Lyngby, Denmark
*
Authors to whom correspondence should be addressed.
These authors contributed equally to this work.
Materials 2018, 11(12), 2464; https://doi.org/10.3390/ma11122464
Received: 9 November 2018 / Revised: 27 November 2018 / Accepted: 1 December 2018 / Published: 4 December 2018
Van der Waals epitaxy (vdWE) has drawn continuous attention, as it is unlimited by lattice-mismatch between epitaxial layers and substrates. Previous reports on the vdWE of III-nitride thin film were mainly based on two-dimensional (2D) materials by plasma pretreatment or pre-doping of other hexagonal materials. However, it is still a huge challenge for single-crystalline thin film on 2D materials without any other extra treatment or interlayer. Here, we grew high-quality single-crystalline AlN thin film on sapphire substrate with an intrinsic WS2 overlayer (WS2/sapphire) by metal-organic chemical vapor deposition, which had surface roughness and defect density similar to that grown on conventional sapphire substrates. Moreover, an AlGaN-based deep ultraviolet light emitting diode structure on WS2/sapphire was demonstrated. The electroluminescence (EL) performance exhibited strong emissions with a single peak at 283 nm. The wavelength of the single peak only showed a faint peak-position shift with increasing current to 80 mA, which further indicated the high quality and low stress of the AlN thin film. This work provides a promising solution for further deep-ultraviolet (DUV) light emitting electrodes (LEDs) development on 2D materials, as well as other unconventional substrates. View Full-Text
Keywords: AlN thin film; WS2; MOCVD; van der Waals epitaxy AlN thin film; WS2; MOCVD; van der Waals epitaxy
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MDPI and ACS Style

Yin, Y.; Ren, F.; Wang, Y.; Liu, Z.; Ao, J.; Liang, M.; Wei, T.; Yuan, G.; Ou, H.; Yan, J.; Yi, X.; Wang, J.; Li, J. Direct van der Waals Epitaxy of Crack-Free AlN Thin Film on Epitaxial WS2. Materials 2018, 11, 2464. https://doi.org/10.3390/ma11122464

AMA Style

Yin Y, Ren F, Wang Y, Liu Z, Ao J, Liang M, Wei T, Yuan G, Ou H, Yan J, Yi X, Wang J, Li J. Direct van der Waals Epitaxy of Crack-Free AlN Thin Film on Epitaxial WS2. Materials. 2018; 11(12):2464. https://doi.org/10.3390/ma11122464

Chicago/Turabian Style

Yin, Yue, Fang Ren, Yunyu Wang, Zhiqiang Liu, Jinping Ao, Meng Liang, Tongbo Wei, Guodong Yuan, Haiyan Ou, Jianchang Yan, Xiaoyan Yi, Junxi Wang, and Jinmin Li. 2018. "Direct van der Waals Epitaxy of Crack-Free AlN Thin Film on Epitaxial WS2" Materials 11, no. 12: 2464. https://doi.org/10.3390/ma11122464

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