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Journal: SensorsVolume: 9Number: 1141
Article: Piezoresistive Sensitivity, Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures
  • Authors:
  • Changzhi Shi1,*,
  • Xiaowei Liu1 and
  • Rongyan Chuai3
Link: https://www.mdpi.com/1424-8220/9/2/1141

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