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Journal: Sensors, 2009
Volume: 9
Number: 1141
Article:
Piezoresistive Sensitivity, Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures
Authors:
by
Changzhi Shi, Xiaowei Liu and Rongyan Chuai
Link:
https://www.mdpi.com/1424-8220/9/2/1141
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