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Journal: Sensors, 2007
Volume: 7
Number: 1713
Article:
Modeling of Photoinduced Deformation in Silicon Microcantilever
Authors:
by
Yu-Lin Guo, Jia Zhou, Yiping Huang and MinHang Bao
Link:
https://www.mdpi.com/1424-8220/7/9/1713
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