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Journal: Sensors, 2007
Volume: 7
Number: 3071

Article: Three Cavity Tunable MEMS Fabry Perot Interferometer
Authors: by Avinash Parashar, Ankur Shah, Muthukumaran Packirisamy and Narayanswamy Sivakumar
Link: https://www.mdpi.com/1424-8220/7/12/3071

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