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Journal: Sensors, 2007
Volume: 7
Number: 3071
Article:
Three Cavity Tunable MEMS Fabry Perot Interferometer
Authors:
by
Avinash Parashar, Ankur Shah, Muthukumaran Packirisamy and Narayanswamy Sivakumar
Link:
https://www.mdpi.com/1424-8220/7/12/3071
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