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Journal: SensorsVolume: 24Number: 2743
Article: Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator
  • Authors:
  • Mehdi Allameh1,2,*,
  • Byoungyoul Park2 and
  • Cyrus Shafai1
Link: https://www.mdpi.com/1424-8220/24/9/2743

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