Article Versions Notes

Liu W, Lu Y, Chen Z, Jia Q, Zhao J, Niu B, Wang W, Hao Y, Zhu Y, Yang J, et al. A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000. Sensors. 2023; 23(8):3808. https://doi.org/10.3390/s23083808

Liu, Wenli, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang, Yalu Hao, Yinfang Zhu, Jinling Yang, and et al. 2023. "A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000" Sensors 23, no. 8: 3808. https://doi.org/10.3390/s23083808

Liu, W., Lu, Y., Chen, Z., Jia, Q., Zhao, J., Niu, B., Wang, W., Hao, Y., Zhu, Y., Yang, J., & Yang, F. (2023). A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000. Sensors, 23(8), 3808. https://doi.org/10.3390/s23083808